The thermal flow sensor

The present invention relates to a thermal flow sensor for measuring the flow of a fluid with a heating element and a measuring element, the heating element and the measuring element are arranged on a semiconductor chip and thermally coupled to each other, wherein the sensing element by the heating element can be heated and the heating element and the measuring element are arranged at a small distance from one another monolithically integrated on the semiconductor chip, the heating element is a temperature-dependent low-impedance resistor and the measuring element is a temperature dependent high-resistance resistor.