Self-supporting transmission metal grating based on nanometer stamping technology and its preparation method

The invention relates to a high-intensity, self-supporting transmission metal grating which is made based on nanometer imprinting technique, and is used for diffraction of deep ultraviolet ray, soft X ray and material particle; the line density of the metal grating is larger than 2000 bars per millimeter, the grating is not supported by any substrate, a gap between the metal lines of the grating is hollow, the metal lines are supported by metal network structure with enough intensity and relatively larger cycle (1 to 40 micrometer), the metal material of the grating is made by gold. The manufacturing steps: (1) high density metal grating is prepared on the substrate through nanometer imprinting technique, reactive ion etching technique and electrochemical filming technique; (2) metallic network supporting structure with major cycle is prepared through photo-etching technique and electrochemical filming technique; (3) the substrate is removed by a chemical etching method to lead the grating to be hollow; (4) focused ion beam technology is used for repairing local defects generated during the manufacturing process of the transmission grating. The metal grating of the invention has the advantages that the manufacture method for the nanometer imprinting technique preparation grating structure is convenient and reliable, which greatly reduces the manufacture cost.