The structure and tribological behaviors of CrN and Cr–Ti–N coatings

Abstract The Cr–Ti–N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr–Ti–N coating shows a much smoother surface than CrN coating. Cr–Ti–N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures.