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Dependence of surface morphology of N-polar AlN on misorientation angle of sapphire substrate
Dependence of surface morphology of N-polar AlN on misorientation angle of sapphire substrate
2019
Tatsuya Isono
Tatsuya Ezaki
Tadatoshi Ito
Ryota Sakamoto
Yongzhao Yao
Yukari Ishikawa
Narihito Okada
Kazuyuki Tadatomo
Keywords:
Materials science
Metalorganic vapour phase epitaxy
Morphology (linguistics)
Crystallography
sapphire substrate
Misorientation
Polar
Correction
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