A design of experiments approach to an optimized SC-1/megasonic clean for sub-0.15 micron particle removal

A statistical design of experiments approach has been employed to evaluate the particle removal efficacy of the SC-1/megasonic clean for sub-0.15 {mu}m inorganic particles. The effects of megasonic input power, solution chemistry, bath temperature, and immersion time have been investigated. Immersion time was not observed to be a statistically significant factor. The NH{sub 4}OH/H{sub 2}O{sub 2} ratio was significant, but varying the molar H{sub 2}0{sub 2} concentration had no effect on inorganic particle removal. Substantially diluted chemistries, performed with high megasonic input power and moderate-to-elevated temperatures, was shown to be very effective for small particle removal.