MEMS based on nanoparticle gas sensor for air quality system

In this study, nanopower ZnO and as sensing materials were prepared by hydrazine and hydrothermal routes, respectively, and were doped with Pd, Ru catalyst. The CO and sensors were fabricated by coating of sensing materials on the MEMS-based structure with electrodes and heaters. The 0.1 wt% Pd doped sensor and Ru doped ZnO sensor showed the high sensor response to CO 30 ppm and 1 ppm, respectively. The sensor signal was stable. This can be used for the detection of pollutant gases emitted from gasoline engine.