Protective films of diamond for high Tc superconducting detectors

Abstract Deposition of diamond like carbon (DLC) films on YBCO superconducting detectors is reported. The method is to make a DLC film by C + implantation and XeCl excimer laser irradiation. The implantation energy is 20–35 keV and C + implantation dosages D =1×10 14 –5×10 18 ions/cm 2 . The parameters of XeCl excimer laser ablation are: wavelength, 308 nm; energy density, 20–50 mJ/cm 2 ; and width of pulse, 45 ns. The superconductivity of C + -implanted YBCO is also investigated, while the damage behavior of C + implantation and the mechanism of coating DLC are analyzed.