Double-cavity plasma microwave resonant cavity

The invention relates to a double-cavity plasma microwave resonant cavity. The resonant cavity comprises resonant cavity casings and a waveguide assembly connected with the resonant cavity casings. The resonant cavity is characterized in that the two resonant cavity casings which are symmetrical in a front-and-back manner and have parallel axes are arranged, the waveguide assembly is mounted on one side between the two parallel resonant cavity casings along the vertical center line, the front end of the waveguide assembly is connected with the two resonant cavity casings through a dichotomy power meter, and microwave source powder is equally divided into two pieces by the dichotomy power meter to be fed in the two parallel resonant cavity casings. The microwave power of the waveguide device is divided into two pieces to be fed in the two axial resonant cavity casings, so that the feed power of the resonant cavity can be effectively increased, and the leakage of microwaves can be effectively reduced. The resonant cavity is reasonable in arrangement and simple in structure, two parallel resonant cavities are installed on one deposition lathe, and the equipment use efficiency of the deposition lathe can be effectively improved.