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Deposition of metal thin films using hyperthermal ions
Deposition of metal thin films using hyperthermal ions
2000
Joshua M. Pomeroy
Aaron Couture
Colin Hill
James P. Sethna
B. H. Cooper
Joel D. Brock
M.V.R. Murty
Joachim Jacobsen
Keywords:
Deposition (law)
Chemical engineering
Ion
metal thin film
Materials science
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