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Simulation of Neutral Gas Dynamics for PVD DC-MSIP and HPPMS Processes
Simulation of Neutral Gas Dynamics for PVD DC-MSIP and HPPMS Processes
2013
Kirsten Bobzin
Marcel Pascal Schäfer
Jan Trieschmann
R.H. Brugnara
Sebastian Theiss
Nazlim Bagcivan
Thomas Mussenbrock
Ralf Peter Brinkmann
Keywords:
Nuclear engineering
High-power impulse magnetron sputtering
Gas dynamics
Materials science
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