Experimental study of disharge characteristics and fluorine atom yield on DC discharge of NF 3 /He

DC discharge characteristics of NF3/He have investigated experimentally at many kinds of experimental conditions, for example, different electrodes material, a few of distance between the two electrodes, flow rates of the gas NF 3 or He, a series of series-wound resistances and give the steady and optimum discharge parameters finally. Fluorine atom yield from the DC discharge of NF3/He have studied experimentally and the relationship of fluorine atom yield and the load power is shown for the first time.