Ceramic pressure sensors and differential pressure sensor

2000 
A ceramic pressure sensor and differential pressure sensor has base and diaphragm made of same ceramic material. The opposite surfaces of said base with hole and said diaphragm have electrodes coatedwith inorganic insulating layer. Said base and diaphragm are respectively surrounded by a convex ring. The opposite surfaces of conver rings are sealed by glass layer. Said electrode is metal film, whose leading wire passes through the hole on base and is then connected to special processor on base. Its advantages are less creep, high response speed and temp stability, high resistance to corrosion, interference and overload, and high accuracy.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []