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The Evaluation of Temporary Degradation in Quarter Micron MOSFET by Hydrogen Passivation of Boron
The Evaluation of Temporary Degradation in Quarter Micron MOSFET by Hydrogen Passivation of Boron
1996
Keiichi Tsukamoto
Taizoh Sadoh
Akihiro Ikeda
Keywords:
Boron
Passivation
MOSFET
Hydrogen
Inorganic chemistry
Materials science
Micrometre
Degradation (geology)
Optoelectronics
hydrogen passivation
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