Near-Field Dynamic Non-Destructive Detection Simulation Based on Microcantilever

An ultrasonic near-field dynamic non-destructive detection method based on Microcantilever is proposed to receive ultrasonic wave, and dynamic response of the near-field scattering of waves from Ultrasonic transducer using microcantilever receiver can be known with FET software COMSOL Multiphysics. The receiver scans the surface point by point and approaches the defect, when the receiver is just ahead of the defect, and the amplitude shows its maximum peak-to-peak value. The changes in the amplitude come from the near-field surface wave interaction with the free boundary of the defect wall. By contrast with experimental results, feasibility of the simulation method is demonstrated, which will contribute to deeper theoretical research on defect location of the micro-components, affording the reference for the follow- up experimental design. Higher resolution is obtained by changing the thickness of the cantilever or adopting more higher order frequency in order to test nano-defects.