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High aspect ratio micro-drilling by laser processing
High aspect ratio micro-drilling by laser processing
2010
Kyoichi Deki
Jun Tsunoda
Masayoshi Tama
Yukihiro Shimada
Akihiko Nishimura
Keywords:
Laser
Thin film
Borehole
Harmonics
Materials science
Polymer
Optics
Dimensionless quantity
Machining
Laser drilling
Correction
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