Old Web
English
Sign In
Acemap
>
Paper
>
Wavelength Dependence on Substrate Temperature Measurement Using Low Coherence Interferometer
Wavelength Dependence on Substrate Temperature Measurement Using Low Coherence Interferometer
2013
Hiroto Kato
Keywords:
Temperature measurement
Substrate (chemistry)
Optics
Wavelength
Interferometry
Coherence (physics)
Physics
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]