Piezoelectric element, inkjet head, angular velocity sensor, production methods for these and inkjet recording device

The present invention discloses a piezoelectric element, an ink jet head, the angular velocity sensor, and a manufacturing method thereof an ink jet recording apparatus. A piezoelectric element, comprising: two electrode films, and a (111) sandwiched between the electrodes of the piezoelectric film preferentially oriented laminate film of two surfaces of the piezoelectric thin film. Two layers of piezoelectric thin film, an aggregate of columnar particles in continuous contact with each other. The average cross-sectional diameter of the average cross-sectional diameter of the columnar particles in the second piezoelectric film is greater than the first piezoelectric thin film of columnar particles. Than the average cross-sectional diameter of the columnar particles and the thickness of the second piezoelectric thin film piezoelectric laminated film 20 less than or equal to 60.