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Determination of electron mean free path in silicon in the 50-1000 eV energy range
Determination of electron mean free path in silicon in the 50-1000 eV energy range
1979
V. I. Zaporozhchenko
Iu. D. Kalafati
Iu. A. Kukharenko
V. M. Sergeev
Keywords:
Solid-state physics
Thin film
Silicon
Atomic physics
electron energy
electron mean free path
Temperature measurement
electron distribution
Materials science
Mean free path
error analysis
Correction
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