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Segmented Modeling of Large-Area VHF PECVD Thin-Film Amorphous Silicon Deposition System
Segmented Modeling of Large-Area VHF PECVD Thin-Film Amorphous Silicon Deposition System
2011
Krishna Shenai
Krushal Shah
Ramasamy Raju
Aarohi Vijh
Keywords:
Amorphous silicon
Thin film
Composite material
Plasma-enhanced chemical vapor deposition
Materials science
Deposition (law)
Optoelectronics
Correction
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