Safety aspects of MOVPE in research and development: An example

Abstract In this paper active and passive safety aspects of the new MOVPE laboratory of the University of Duisburg are discussed. The laboratory is in use since march 1987. During normal operation a spatial separation of operators and MOVPE equipment ensures a maximum of safety. In case of emergency the MOVPE equipment is automatically switched to a safe set of operational conditions and alarms are activated. The gas supervision system interrupts the supply of the toxic gases near the gas tanks stored outside the building and the MOVPE equipment is purged by nitrogen. A wet-chemical scrubbing system removes the toxic gases from the process exhaust to a residual content below the detection limit (