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The Synthesis of Nanoelectromechanical Devices Using Crossed-Carbon Nanotube Geometry
The Synthesis of Nanoelectromechanical Devices Using Crossed-Carbon Nanotube Geometry
2001
Paul Andrew Williams
Hakan Deniz
Ahmed Patel
Gregory M. Hunter
Michael R. Falvo
Richard Superfine
S. Washburn
Keywords:
Scanning electron microscope
Electron-beam lithography
Atomic force microscopy
Photoconductive atomic force microscopy
Analytical chemistry
Carbon nanotube
Materials science
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