VUV/EUV Primary Standard Detector Facility and Transfer Detector Calibration

A transfer standard detector was calibrated for the fist time with respect to the vuv/euv primary standard detector built at the metrology beamline in national synchrotron radiation laboratory (nsrl) at wavelength 17.625nm, 6.8nm and 92nm. the repetitively calibrated quantum efficiencies for si photodiode are in good agreement at each wavelength with the relative accuracy of 1%–14%. but compared with the quantum efficiency from nist, our result has good agreement at wavelength 17.625nm while poor agreement at wavelength 6.8nm and 92nm. the stability of the light source and the spectral impurity has significant effect on calibration.