Effect of a Conducting Film of Finite Thickness Deposited on a Resonator with a Lateral Electric Field on Its Characteristics

A theoretical and numerical study is performed of the effect of the thickness and the coefficients of the elasticity, viscosity, and electrical conductivity of a film deposited on a free side of a piezoelectric resonator with a lateral electric field on its characteristics. It is shown that an increase in the mechanical impedance of the film and its conductivity lower the maximum value of the real part of the resonator’s electrical impedance.