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Optimization of IR heater shapes for mirror temperature control in wafer scanners
Optimization of IR heater shapes for mirror temperature control in wafer scanners
2019
D.W.M. Veldman
S.A.N. Nouwens
R.H.B. Fey
Hans Zwart
Marc van de Wal
J.D.B.J van den Boom
H Henk Nijmeijer
Keywords:
Wafer
Materials science
Temperature control
Optoelectronics
Correction
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