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Examination of Ar ion bombardment effect to ITO Thin Films
Examination of Ar ion bombardment effect to ITO Thin Films
2008
Takahashi Saki
Niki Masato
Nakamura Youhei
Shimizu Hidehiko
Iwano Haruo
Fukushima Yasuo
Nagata Kotaro
Hoshi Yoichi
Keywords:
Analytical chemistry
Thin film
ion bombardment
Materials science
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