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GaN based MEMS accelerometer for high temperature application
GaN based MEMS accelerometer for high temperature application
2018
Boo Hyun An
Mariam Mansouri
Hamda Al Shibli
Tawaddod Saif Alkindi
Hamad Al Yassi
Ji Sung Lee
Mihai Sanduleanu
Daniel S. Choi
Keywords:
Microelectromechanical systems
Optoelectronics
Materials science
Accelerometer
Correction
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