Applicability of Selective Laser Reflow for Thin Die Stacking

Abstract A 3-D packaging approach such as die stacking is an attractive way to package greater functionality and performance into a smaller footprint, often at a reduced overall product cost. Achieving such 3-D integration can however place significant demands on the manufacturing process, often requiring substantial production expense to bond multiple die in a sequential manner. One alternative, potentially offering significant throughput, is the use of selective laser reflow to bond stacked die. This process produces a localized heating of the stacked die sufficient to produce soldered interconnects at the bonding interface but with very short exposure times that minimize the heating of other parts of the assembly and decrease the overall duration of the bonding process. The use of a commercial infrared (IR) laser reflow instrument for the sequential attachment of thin die into a 3-D stack was considered. The bonding technology under study consists of an infrared laser coupled with a custom optics syste...