10.2: Invited Paper: Development of Oxide TFT's Structures

Advanced structures of oxide TFT have been studied for various display applications. Oxide TFT with etch-stopped layer has shown excellent uniformity and stability for display products. For mass production with low cost, however, back channel etched structure with/without titanium etch-stopped one has been studied and demonstrated promising electrical properties comparable to etch stop structure. Furthermore, we have developed self-aligned coplanar structure as one of ways to minimize parasitic capacitance and found excellent electrical properties and bias stability at 6 μm of channel length, which is demonstrated with 13.3 inch AMOLED.