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Film Bulk Acoustic Wave Resonators composed of Pt/PbTiO_3/Ir/SiO_2 structure
Film Bulk Acoustic Wave Resonators composed of Pt/PbTiO_3/Ir/SiO_2 structure
2000
Kenji Yoshida
K. Misu
K Ibata
Akira Yamada
C. Maeda
Keywords:
Nuclear magnetic resonance
Electronic engineering
Acoustic wave
Resonator
Materials science
Acoustics
Optoelectronics
bulk acoustic wave
Correction
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