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Investigation on LPCVD SiON films by means of Rutherford backscattering, FT-IR and UV-VIS Spectroscopy
Investigation on LPCVD SiON films by means of Rutherford backscattering, FT-IR and UV-VIS Spectroscopy
2003
D. Dudu
E. Ivanov
B. N. Bercu
M. Bercu
Mircea Modreanu
Keywords:
surface coating
Analytical chemistry
Materials science
Ultraviolet visible spectroscopy
Spectroscopy
Scattering
Fourier transform infrared spectroscopy
Chemical vapor deposition
Absorption spectroscopy
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