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Anticorrosive behavior of SiCxNyOz thin film produced by room temperature PECVD
Anticorrosive behavior of SiCxNyOz thin film produced by room temperature PECVD
2021
Kenta Hori
Hiroki Kawakami
Hitoshi Habuka
Keywords:
Thin film
Materials science
Plasma-enhanced chemical vapor deposition
Composite material
Correction
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