Polysilicon production tail gas recycling device
2012
The utility model discloses a polysilicon production tail gas recycling device, which comprises a distillation device tail gas recovery system, a tail gas compression system and a hydrogen purification recovery system, wherein the distillation device tail gas recovery system comprises a tail gas collecting tank (1), a primary water cooler (2), a chiller (3) and a gas-liquid separation tank (4), the tail gas compression system comprises a primary tail gas buffer tank (5), a tail gas compression device (6) and a gas-to-gas heat exchanger (7), the hydrogen purification recovery system comprises a secondary tail gas buffer tank (8), a hydrogen buffer tank (10), a first hydrogen separation purification device (9) and a second hydrogen purification device (11), an air inlet of the secondary tail gas buffer tank (8) is connected with a heat side air outlet of the gas-to-gas heat exchanger (7), and an air outlet of the secondary tail gas buffer tank (8) is connected with an air inlet of the first hydrogen separation purification device (9). The polysilicon production tail gas recycling device skillfully combines a reduction system, a polysilicon dry tail gas recovery system and a rectification device, recovers tail gas which contains hydrogen, chlorosilane and hydrogen chloride, and also can purify the hydrogen.
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