Novel construction of a deformable mirror for laser beam shaping
2009
This paper reports on a novel construction of a deformable mirror for laser beam shaping. The deformable mirror is
actuated by screen-printed thick film piezoceramic unimorphs based on lead zirconate titanate (PZT). Different actuator
layouts are realized and will be presented. We use Low Temperature Cofired Ceramics (LTCC) as a substrate material
with a metallization as reflective surface. LTCC offers easy integration of holding structures. The reflective mirror
surface is electroplated copper. After deposition, the copper layer is diamond machined to achieve excellent optical
surface quality <10 nm (rms). We build deformable mirrors with 1, 13 and 19 actuators and a total stroke of more than
20 μm and characterize them with a wave front sensor.
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