A novel MEMS electromagnetic actuator with large displacement

Abstract This paper presents a novel MEMS actuator driven by Lorentz force. The actuator has a structure of folded beams, which is favorable for a large lateral stroke. A displacement of more than 55 μm was achieved with a magnetic field of 0.14 T and the diving current of 8 mA. The actuator can generate a large displacement under a low driving voltage and can easily be integrated with CMOS circuits. Lorentz force is proportional to the magnetic field and the driving current, which results in an easy control of the lateral displacement on the diving current. The simple structure and fabrication process ensure the actuator to have a high fabrication yield and good stability.