Defects detecting method of copper interconnects based on signal reflection theory

Based on the signal reflection theory, this paper investigates the diction method of loss object defects in copper interconnects. The signal is reflected at the edge of impedance discontinuity, which is caused by the defects in interconnects. The reflection results of defects with different size and with different signal rise time are investigated. The results show that signal reflection caused by the defects is very obvious for the defect of 1µm length and signal rise time of 0.01ps. The defects can be detected easily in this case. The reasons of rapid rise time of signal are analyzed at the end of this paper.