Device for measuring Seebeck coefficient and resistivity of semi-conductor film material

2007 
The present invention discloses a device used for measuring seebeck coefficient and electrical resistivity of semiconductor film materials at room temperature, wherein a thermopile and a heat conduction copper block having cold and heat terminals are integrated into a whole block, a cavum is formed at the lower part of the block, and an electric potential probe is deposited in the cavum. The seebeck electric potential detection points and the cold/heat ends thermocouple are deposited at the lower end of the heat conduction copper block; the electric potential probe, the detection points and the thermocouple are connected respectively to a gathering module; a reference resistor is connected in serial to a conversion switch and is also connected to the detection points; a constant current source is connected to the conversion switch; the conversion switch is connected to a data gathering module; the data gathering module is connected to a computer wherein gathered data is processed through a virtual instrument software to obtain the detection results. A detection platform is divided into two parts, wherein the upper part is used for fixing detection modules, and the lower part is used for supporting samples and has a screw used for lifting samples upwards to achieve a contact of samples and detection points. Said device is capable of perform a measurement of seebeck coefficient and electrical resistivity at the same time without destroying the thin film; furthermore, the measuring course is simple, and both the device lost and the testing cost are lower.
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