Old Web
English
Sign In
Acemap
>
Paper
>
Fourier transform infrared spectroscopic analysis of spin-on dopant layers used in proximity rapid thermal diffusion
Fourier transform infrared spectroscopic analysis of spin-on dopant layers used in proximity rapid thermal diffusion
1994
Fernando Romero-Borja
Piotr B. Grabiec
Wanda Zagozdzon-Wasik
Lowell L Wood
Keywords:
Spin-½
Infrared
Materials science
Fourier transform
Thermal diffusivity
Molecular physics
Dopant
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]