Construction of Precision Measurement Interferometer for Standard Ball Diameter

We constructed an interferometer for precise measurement of the ball diameter, and measured the diameter of steel ball with a diameter of 78 mm. The interferometer was consisted of etalon to instal ball between two parallel plates and placed on the monolithic flexure to be moved parallel. The ball diameter was calculated from phase difference of one pair of signals interfered between the both sides of ball and two parallel plates, and the signals was observed by photodetectors with scanning the etalon. The results showed that the diameter of steel ball was 78.1893544 mm and measurement uncertainty of 29 nm in confidence level of 95.5%.