Palladium Membrane Microreactors

Novel palladium membrane microreactors have been designed and microfabricated. Selective hydrogen flux has been demonstrated through the palladium membrane in the microreactor. The membrane microreactors can be used for a variety of hydrogenation and dehydrogenation reactions, as well as in hydrogen purification applications. The microfabrication process allows for integration of heaters and temperature sensors into the device. The e-beam deposited thin Pd film achieves excellent hydrogen selectivity at high permeation rates. The membrane has good mechanical strength and has been shown to withstand pressure gradients of over 5 atm. A model hydrogenation reaction has been demonstrated in the palladium membrane reactor. Microfabricated palladium membrane reactors enable new applications because of their small size, fast thermal response times, and high efficiency.