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The Influence of Thermal Silicon Nitride Formation on VLSI Fabrication
The Influence of Thermal Silicon Nitride Formation on VLSI Fabrication
1983
Akira Shintani
Takahisa Kusaka
Shoichi Mizuo
Kunio Hayashi
Hidekazu Okuhira
Keywords:
Silicon nitride
Cardiology
Internal medicine
Hybrid silicon laser
Very-large-scale integration
LOCOS
Medicine
Etching (microfabrication)
Nitride
Electronic engineering
Correction
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