Combined electrical resistivity-electron reflectivity measurements for evaluating the homogeneity of hydrogen-terminated diamond surfaces

Abstract The homogeneity of hydrogen termination on single-crystal CVD diamond surfaces exposed to air was studied with a new approach that encloses a combination of sheet resistance measurements, performed using four-point-probe method in Van Der Pauw configuration, and electron reflectivity measurements performed at intermediate kinetic energy to derive surface sensitive information on the chemical terminations (inelastic mean free path