Preparation and structural properties for GaN films grown on Si (1 1 1) by annealing

Abstract High quality GaN films were prepared by annealing sputtered Ga 2 O 3 films under flowing ammonia. Ga 2 O 3 films were deposited on Si (1 1 1) substrates by r.f. magnetron sputtering. X-ray diffractometer (XRD) and X-ray photoelectron spectroscopy (XPS) measurement results indicate that the polycrystalline GaN with hexagonal structure was successfully grown on the Si (1 1 1) substrate. The surface morphology of the GaN films was examined by atomic force microscopy (AFM) and scanning electron microscopy (SEM). Varying the annealing temperature and time was found to have great effect on the grain size.