Zinc Oxide Nanostructured Materials Prepared by PECVD as a Platform for Biosensors

Zinc oxide nanostructures are widely used as a platform for biosensors. Extremely sensitive gas sensors made of ZnO are not only cheap and easy to manufacture, but also diverse in terms of types of nanostructures. In this work zinc oxide nanstructures were prepared via on-stage plasma-chemical interaction of zinc vapors with oxygen. Argon of high purity was also used as a career gas for zinc transport to the discharge zone and as a plasma feed gas. The process was carried out at the low pressure (0.1 Torr) in inductively coupled nonequilibrium RF (40.68 MHz) plasma discharge. Optical emission diagnostic has been performed to characterize the main parameters of the plasma-chemical process. The AFM technique was implemented for specifications of the materials surface parameters.