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Thin Dielectric Behavior and Boron Penetration under High Temperature H2 SEG Prebake
Thin Dielectric Behavior and Boron Penetration under High Temperature H2 SEG Prebake
1991
Mazure
Fitch
Denning
Gunderson
Haond
Straboni
Piot
Barla.
Keywords:
Dielectric
Optoelectronics
Capacitor
boron penetration
Silicon
Materials science
Logic gate
Boron
Correction
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