DIAGNOSTICS OF THE E.C.R. CAPRICE ION SOURCE

Spectroscopic investigation in the 10–80 nm spectral range of the plasma generated by an Electron Cyclotron Resonance (E.C.R.) ion source has been realized. The results are based on oxygen. O V intensity line ratio measurements inside the plasma are investigated as a function of the RF power. Results are correlated with the extracted O4+ current. The electronic density and temperature have been derived from the computed results of Kato et al. Finally, first determination of ionic densities and lifetimes have been performed.