Silicon micromirrors and their prospective application in the next-generation space telescope

This paper describes a potential application of silicon surface micromachined (SMM) mirrors to a space imaging application. We have developed micromirror arrays that can be individually addressed for potential use in a spectrometer planned for NASA's Next Generation Space Telescope (NGST), which will be launched later this decade. An array of micromirrors has been designed to replace a conventional fixed slit mask that is commonly used in spectrometer instruments. The fixed slit mask is used to select the desired portions of an incoming optical signal for analysis. These mirrors are designed to operate in two states, on and off, with the on position directing the signal into the instrument. Such an array of micromirrors can then be used as a "programmable" slit mask where portions of the incoming field of view can be selected in software.