Biochips on CMOS: an active matrix address array for DNA analysis

Abstract This paper reports a new development using a fully silicon active substrate and DNA probe electro-immobilisation. The DNA chip described is using CMOS 0.8 μm technology and an integrated multiplexer to address successively the electrode on which a specific DNA probe will be deposited. This approach is well adapted for low to medium range number of probes (50–1000) device. Applications targeted by this kind of device are wide, from specific kit of diagnosis to cancerology and agronomy. The final demonstrator is a 128 DNA probe chip which is used for the analysis of genes involved in Oncology.