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Defect Free Embedded Silicon Carbon Stressor Selectively Grown into Recessed Source Drain Areas of NMOS Devices
Defect Free Embedded Silicon Carbon Stressor Selectively Grown into Recessed Source Drain Areas of NMOS Devices
2007
Matthias Bauer
Yangting Zhang
Doran Weeks
Vladimir Machkaoutsan
Shawn G. Thomas
Keywords:
NMOS logic
Stressor
Optoelectronics
Carbon
Silicon
Materials science
Electronic engineering
defect free
Correction
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