P‐50: Low K Acryl Resin as Planarization Layer on TFT LCD

In this paper, acryl resin based on ADS process parameters, and its benefit on TFT LCD product is introduced. By analysis of adhesion, exposure energy, developing time, bleach energy and cure parameters, acryl resin optimized process parameters are confirmed. With JSR PC548 positive acryl resin, our ADS product achieves good surface planarization and the product logic power has a nearly 30% decrease.