GaAs-compatible surface-micromachined RF MEMS switches

A MEMS switch has been developed for microwave applications. The switch has an actuation of 30 V, a response time of 20 /spl mu/s, and mechanical robustness to withstand 10/sup 9/ actuations. An RF performance with >50 dB isolation below 2 GHz and <0.2 dB insertion loss from DC to 40 GHz has been measured.